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Fabrication Of Hollow Optical Waveguides On Planar Substrates, John P. Barber
Fabrication Of Hollow Optical Waveguides On Planar Substrates, John P. Barber
Theses and Dissertations
This dissertation presents the fabrication of hollow optical waveguides integrated on planar substrates. Similar in principle to Bragg waveguides and other photonic crystal waveguides, the antiresonant reflecting optical waveguide (ARROW) is used to guide light in hollow cores filled with liquids or gases. Waveguides with liquid or gas cores are an important new building block for integrated optical sensors. The fabrication method developed for hollow ARROW waveguides makes use of standard microfabrication processes and materials. Dielectric layers are deposited on a silicon wafer using plasma-enhanced chemical vapor deposition (PECVD) to form the bottom layers of the ARROW waveguide. A sacrificial …
Compact And Low Loss Silicon-On-Insulator Rib Waveguide 90° Bend, Yusheng Qian, Seunghyun Kim, Jiguo Song, Gregory P. Nordin, Jianhua Jiang
Compact And Low Loss Silicon-On-Insulator Rib Waveguide 90° Bend, Yusheng Qian, Seunghyun Kim, Jiguo Song, Gregory P. Nordin, Jianhua Jiang
Faculty Publications
A compact and low loss silicon-on-insulator rib waveguide 90° bend is designed and demonstrated. An interface realized by a trench filled with SU8 at the corner of a waveguide bend effectively reflects incoming light through total internal reflection (TIR). In order to accurately position the SU8-filled trench relative to the waveguide and reduce sidewall roughness of the interface, electron beam lithography (EBL) is employed while inductively coupled plasma reactive ion etching (ICP RIE) is used to achieve a vertical sidewall. The measured loss for TE polarization is 0.32 dB ± 0.02 dB/bend at a wavelength of 1.55 µm.