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Marquette University

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MEMS

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Cantilever-Based Resonant Microsensors With Integrated Temperature Modulation For Transient Chemical Analysis, C. Carron, P. Getz, Stephen M. Heinrich, Fabien Josse, Oliver Brand Jun 2015

Cantilever-Based Resonant Microsensors With Integrated Temperature Modulation For Transient Chemical Analysis, C. Carron, P. Getz, Stephen M. Heinrich, Fabien Josse, Oliver Brand

Civil and Environmental Engineering Faculty Research and Publications

This work introduces a resonant cantilever platform with integrated temperature modulation for real-time chemical sensing. Embedded heaters allow for rapid thermal cycling of individual sensors, thereby enabling real-time transient signal analysis without the need for a microfluidic setup to switch between analyte and reference gases. Compared to traditional mass-sensitive microsensors operating in steady state, the on-chip generation of signal transients provides additional information for analyte discrimination.


Influence Of Fluid-Structure Interaction On Microcantilever Vibrations: Applications To Rheological Fluid Measurement And Chemical Detection, Isabelle Dufour, E. Lemaire, B. Caillard, H. Debeda, C. Lucat, Stephen M. Heinrich, Fabien Josse, Oliver Brand Jan 2013

Influence Of Fluid-Structure Interaction On Microcantilever Vibrations: Applications To Rheological Fluid Measurement And Chemical Detection, Isabelle Dufour, E. Lemaire, B. Caillard, H. Debeda, C. Lucat, Stephen M. Heinrich, Fabien Josse, Oliver Brand

Civil and Environmental Engineering Faculty Research and Publications

At the microscale, cantilever vibrations depend not only on the microstructure’s properties and geometry but also on the properties of the surrounding medium. In fact, when a microcantilever vibrates in a fluid, the fluid offers resistance to the motion of the beam. The study of the influence of the hydrodynamic force on the microcantilever’s vibrational spectrum can be used to either (1) optimize the use of microcantilevers for chemical detection in liquid media or (2) extract the mechanical properties of the fluid. The classical method for application (1) in gas is to operate the microcantilever in the dynamic transverse bending …