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Chemical Engineering

San Jose State University

Selected Works

2006

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Santa Clara County Soft First Story Multi Unit Building Survey, Guna S. Selvaduray, S. Vukazich, J. Tran Nov 2006

Santa Clara County Soft First Story Multi Unit Building Survey, Guna S. Selvaduray, S. Vukazich, J. Tran

Guna S. Selvaduray

The objective of this survey was to provide data to emergency managers in Santa Clara County on the number of soft first-story multifamily dwellings (MFD) located in their communities using a cost-effective town-gown partnership. Target areas of cities were found by identifying areas containing residential units of two or more stories that had four or more living units. The survey found that 2,630, or 36%, of the 7,391 MFD in Santa Clara County are of the soft first-story construction type. It was found that one out of every nine apartment units in Santa Clara County is located in a soft …


The Microstructure And Grain Size Of Jet Electroplated Copper Films In Damascene Trench Features, Andrew Tzanavaras, Gregory Young, Stacy H. Gleixner Jan 2006

The Microstructure And Grain Size Of Jet Electroplated Copper Films In Damascene Trench Features, Andrew Tzanavaras, Gregory Young, Stacy H. Gleixner

Stacy H. Gleixner

The brightening additive level and dc current density of electroplating baths are two parameters that affect the gap-filling capability and the degree of impurity incorporation in electroplated copper films. Additive incorporation can inhibit grain growth during the room temperature recrystallization process and therefore affect the final grain size. This investigation explores the grain size and microstructure of dc jet-electroplated copper films in 0.35 and 0.50μm Damascene trenches as a function of current density and brightening additive level after first receiving a high-temperature anneal. Unlike a previous study that explored these variables in blanket Cu films [ J. Electrochem. Soc. , …