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Fabrication Of Magnetic Two-Dimensional And Three-Dimensional Microstructures For Microfluidics And Microrobotics Applications, Hui Li
Theses and Dissertations--Mechanical Engineering
Micro-electro-mechanical systems (MEMS) technology has had an increasing impact on industry and our society. A wide range of MEMS devices are used in every aspects of our life, from microaccelerators and microgyroscopes to microscale drug-delivery systems. The increasing complexity of microsystems demands diverse microfabrication methods and actuation strategies to realize. Currently, it is challenging for existing microfabrication methods—particularly 3D microfabrication methods—to integrate multiple materials into the same component. This is a particular challenge for some applications, such as microrobotics and microfluidics, where integration of magnetically-responsive materials would be beneficial, because it enables contact-free actuation. In addition, most existing microfabrication methods …
Label-Free Biochemical Recognition Using Mems Resonators For Microarray Technology, Babak Tousifar
Label-Free Biochemical Recognition Using Mems Resonators For Microarray Technology, Babak Tousifar
Electronic Theses and Dissertations
Highly sensitive biosensors capable of detecting and characterizing smallest quantities of cellular and molecular targets are needed in pharmaceutical and medical diagnostics industries. In this work, the importance of biological target recognition specifically proteins through microarray technologies has been discussed and the most successful tools and techniques have been studied. Moreover, a thermally actuated Micro Electro-Mechanical Systems (MEMS) resonator has been demonstrated and fabricated in this work as an accurate, reliable and low cost biotechnology tool. As a proof of concept, amine to epoxide coupling of octadecylamine to functionalized silicon dioxide surface have been shown through resonator frequency monitoring. The …