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Modeling Of Depth Distribution Of X-Ray Production, J. D. Brown

Scanning Electron Microscopy

Knowledge of X-ray production as a function of depth by electrons (𝜙(𝜚z) curves) is important in quantitative electron probe microanalysis and other electron beam technologies. Extensive measurements of such curves have been made for electron energies between 6 and 30 keV and for many X-ray lines and matrix elements. Two experimental techniques based on measurements on sandwich or wedge shaped specimens have been used.

A number of expressions have been used to model 𝜙(𝜚z) curves from a square function through complicated polynomial expressions. Recently, a Gaussian model has been proposed which accurately reflects the shape of the 𝜙(𝜚z) curves and …

Monte Carlo Calculations For Electron Microscopy, Microanalysis, And Microlithography, David F. Kyser

Scanning Electron Microscopy

The methodology of Monte Carlo simulation for electron scattering and energy dissipation in solid targets is reviewed. The basic concepts of single and multiple elastic scattering models are compared, and the continuous energy loss model for inelastic scattering is discussed. Some new developments in Monte Carlo simulation are reviewed, including improvements in the elastic scattering model and discrete models for inelastic scattering. A variety of practical applications of Monte Carlo calculations in the fields of electron microscopy, electron probe microanalysis, and electron beam lithography are reviewed. The Monte Carlo computer program listings available in the literature are also described.

Monte Carlo Electron Trajectory Calculations Of Electron Interactions In Samples With Special Geometries, Dale E. Newbury, Robert L. Myklebust

Scanning Electron Microscopy

Implementing a Monte Carlo simulation for application to electron sample interactions requires use of accurate treatments of elastic and inelastic scattering. In formulating a Monte Carlo simulation, careful testing must be carried out to ensure that the calculation yields sensible and useful results. A suitable testing procedure includes calculation of (1) electron backscatter coefficients as a function of atomic number, including any necessary adjustment of scattering parameters; (2) backscatter coefficients as a function of specimen tilt; (3) backscatter and transmission coefficients for thin foils; (4) backscattered electron energy distributions; (5) electron spatial distributions; and (6) x-rays, including x-ray depth distributions, …